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发明名称
METHOD FOR PURIFYING MONOSILANE
摘要
申请公布号
JPS5930711(A)
申请公布日期
1984.02.18
申请号
JP19820139206
申请日期
1982.08.12
申请人
SHOWA DENKO KK
发明人
KAWASAKI KEIJI;TAZAWA SHIYOUICHI
分类号
C01B33/04;B01J20/18;C01B39/14
主分类号
C01B33/04
代理机构
代理人
主权项
地址
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