| 摘要 |
PURPOSE:To perform the cleaning and scrubbing operations simultaneously on a conveyor truck by a method wherein the wafers are conveyed by means of the liquid sprayed from the nozzles arranged on the conveyor truck. CONSTITUTION:In a block 20 comprising a conveyor truck 2, a guide is provided on the side of a case and the surface of the container is formed into a groove along the bottom of which the nozzles 7-12 are arranged. The wafer from water supply pipe filling the cavity of the box container is sprayed from the nozzles pushing up the bottom of the wafers to make them float and advance in the direction to be conveyed. On the other hand, the surface of the wafers is cleaned up with the chemical solution sprayed from a chemical solution nozzle 7 and scrubbed with a scrubbing brush 13 through the intermediary of the chemical solution from another chemical solution nozzle 8 then cleaned, scrubbed with chemical solution, repeatedly cleaned and so forth likewise finally dried up with the air jetted from an air blow nozzle 12. |
