| 摘要 |
PURPOSE:To obtain a thermal head made inexpensive by reducing the amount of gold to be used in high yield, by constituting the electrode of the thermal head from a laminate consisting of a chromium layer, a copper layer formed thereon by a vapor deposition method and a gold layer formed on said copper layer by a vapor deposition method. CONSTITUTION:A heat generating resistance layer 2 comprising a tantalum nitride layer 2 is formed on a ceramic substrate 1 having a glaze glass layer on the surface thereof in a pattern form and pattern electrode 10 is formed on the upper surface of the part of said heat generating resistance layer 2. This electrode 10 is formed of a three-layered structure consisting of a chromium layer with a thickness of 300-3,000Angstrom , a copper vapor deposition layer 12 with a thickness of 300Angstrom -3mum and a gold vapor deposition layer with a thickness of about 1,000Angstrom . In the next step, an oxidation inhibiting layer 7 comprising silicon dioxide or the like and an anti-wear layer 8 comprising tantalum peroxide or the like are applied to the exposed part of the heat generating resistance layer 2 and the end part of the electrode 10 adjacent thereto. |
