发明名称 IMMERSION DISTANCE HOLDING DEVICE
摘要 PURPOSE:To prevent the resolving power of an optical system from decreasing by equipping a control system with a reference device which has flow rate resistance similar to that of the opening part of a detector and a suction path with flow rate resistance similar to that of a suction path for liquid from the detector. CONSTITUTION:An amplification control circuit 10 drives a sample table 8 so that the output of a piezoelectric transducer 9, i.e. pressure in the detector 3 is constant. When the suction pressure of a suction source 11 fluctuates, the detected pressure in the detector 3 also varies to cause malfunction apparently as if an interval (h) were varied. For this purpose, the reference device which has a restrictor 14 with flow rate resistance similar to flow rate resistance depending upon the interval between the detector opening part 19 and a sample 17 and a restrictor 13 similar to a restrictor 12 is coupled with the suction source 11. Consequently, the variation with the pressure difference between the detected pressure and reference pressure is eliminated and the piezoelectric transducer 9 transduces this pressure difference into an electric signal; and the amplification control circuit 10 drives the sample table so that its output value is constant. Therefore, the malfunction of the control system is eliminated and a decrease in the resolving power of the optical system is prevented.
申请公布号 JPS5919912(A) 申请公布日期 1984.02.01
申请号 JP19820129065 申请日期 1982.07.26
申请人 HITACHI SEISAKUSHO KK 发明人 KAWAMURA YOSHIO;TAKANASHI AKIHIRO;KUROSAKI TOSHISHIGE;KUNIYOSHI SHINJI;HOSAKA SUMIO;TERASAWA TSUNEO
分类号 G01N21/01;G02B7/28;G02B21/00;H01L21/027 主分类号 G01N21/01
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