| 摘要 |
PURPOSE:To contrive to save labor by a method wherein a holding base provided with many spot facing parts is placed on a carriage belt for intermittent feed, and then wafers are automatically supplied to the spot facing parts via a slide from elevatable devices at the upper position in the neighborhood of the carriage blet. CONSTITUTION:When the dorr 3 of a reaction tube 2 is opened, and the device 18 is operated by placing the holding base 9 on the carriage belt 6 for intermittent belt, the wafers 15 are pushed out from a cartridge 14 one by one, levitated over the slide 16 by compressed air spouting from holes, and then slide down to the spot facing parts 8. The carriage belt 6 is stopped when it moves and detects 20 the spot facing parts 8. On the other hand, when the device 18 feeds out the wafers 15 from the hole 12a, a device 13 interlocks with the device 18, and then is on standby by lowering the cartridge 14 by a pitch. This constitution enable to mount the wafers on the holding base 9 in a short time without contamination and damage of the wafers. |
