| 摘要 |
PURPOSE:In synthesizing diamond using a metal as a catalyst for diamond synthesis and a mixed gas of CH4 gas and H2, to avoid the use of expensive parts and an electric source, by ionizing these gases, applying a positive bias voltage to the space between a base and an evaporation crucible. CONSTITUTION:A crucible in which a base and a metal for gaseous phase synthesis of diamond, such as Fe, Ni, etc. or its alloy, is put in a vacuum container. The base is heated at 400-1,000 deg.C, the catalytic metal in the crucible is evaporated as a mixed gas of CH4 and H2 is introduced from the outside into it. The amount of the metal vapor is about 0.1-10% based on CH4 mole. The metal vapor and the introduced gases are ionized in a reaction zone in the space between the crucible and the base by high frequency electric field, or DC electric field, the gas pressure in the container is kept at 10<-4>-10Torr, and a bias voltage is applied to the space between the base and the evaporation crucible. |
