| 摘要 |
PURPOSE:To shorten the time required for carrying the wafer, and to improve a throughput by constituting an arm by support pins, one ends thereof are fixed to two shafts set up in a partially rotatable mannear at an interval smaller than the size of a diameter of the wafer and the other ends thereof can be brought into contact with the back of the wafer. CONSTITUTION:One ends of the support pins 24a, 24b are brought into contact with the back and pushed up while the wafer 30 caught through a contact of the bottoms of the outer circumferential surfaces of the shafts 23a, 23b with the surfaces of end sections at that time is carried up to the wafer placing position of a lower electrode 12 by driving the arm 21 to the reaction chamber 10 side by a reciprocating drive 20 under the state. The wafer 30 is brought into contact and supported to each one end of the support pins 24a, 24b rotating in the counterclockwise direction and the clockwise direction in grooves 15 and drops by turning the shaft 23a in the counterclockwise direction and the shaft 23b in the clockwise direction by a turning gear 22, and is placed at the wafer placing position of the lower electrode 12. The support pins 24a, 24b releasing the wafer 30 place the wafer at the placing position by further turning the shaft 23a in the counterclockwise direction and the shaft 23b in the clockwise direction. |
