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发明名称
POLYESTER ETCHING PROCESS
摘要
申请公布号
JPS5912945(A)
申请公布日期
1984.01.23
申请号
JP19830082859
申请日期
1983.05.13
申请人
INTERN BUSINESS MACHINES CORP
发明人
PERONIKA ION MEINNBANTON;RANGASUWAMII SURINIBUASAN
分类号
C08J7/00;B29C35/08;B29C59/16;G03F7/039;H01L21/302
主分类号
C08J7/00
代理机构
代理人
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