| 摘要 |
PURPOSE:To enable the independent adjustment in various directions with high accuracy by forming the parts near both ends of a support beam to a circular cylindrical shape, and sandwiching the support beam with a circular cylindrical parts by means of a feed screw and a spring member from both sides thereby supporting the support beam. CONSTITUTION:Feed screws 23-2, 24-2 for locking are loosened and are kept tightened up after adjustment in order to adjust the support beam 21 on which a convex mirror 3 is suck. The operation is accomplished commonly for all adjustments in directions X, Y, Z and angles theta, phi. The adjustment in the X-axis direction is accomplished by loosening the screw 23-2 for locking and turning the feed screw 23-1 to move the same forward or backward in the X-axis direction. Even if the screw 23-2 is loosened, a circular cylindrical part 21b is pressed to a leaf spring 25; therefore, no restraint is released, and said part is moved in precise follow up to the advance or retreat of the screw 23-1. If such operation is performed at an equal extent in the same direction on both end sides of the beam 21, the adjustment in the X-axis direction is easily accomplished without accompanying the rotation in the direction theta. The similar adjustments are also possible with regard to feed screws 24-1, y-28. |
