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发明名称
METHOD AND DEVICE FOR SLICING SEMICONDUCTOR INGOT
摘要
申请公布号
JPS594030(A)
申请公布日期
1984.01.10
申请号
JP19830107619
申请日期
1983.06.15
申请人
GENERAL SIGNAL CORP
发明人
RICHIYAADO ERU REIN
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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