| 摘要 |
PURPOSE:To enable to make simultaneous observation on a plurality of devices as well as to make observation on the device of large size without reducing magnification by a method wherein a microscope is movably provided in parallel with the direction in which semiconductor parts are conveyed. CONSTITUTION:A sliding shaft 40 is fixed on a parallel shifting block 29, a sliding block 43 is slidably inserted to the shaft 40, and a microscope shaft 50 is fixed to the block 23. When observation is going to be made, a rocking block 22 is contacted to a stopper 23, set screws 24 and 34 are tightened, and the block 43 is shifted along the shaft 40 in the state wherein a set screw 48 is loosened, thereby enabling to make simultaneous observation on a plurality of devices. As the microscope 51 can be shifted in the C and D directions which are at right angle to the direction wherein a lead frame is fed, observation of a large-sized lead frame can be made easily. |
