| 摘要 |
PURPOSE:To produce the titled Si3N4 having a high alpha rate while preventing the mixing in of impurities and deterioration of productivity by adding a small amt. of CaCO3 to silicon powder, and nitriding the mixture in a vacuum nitriding furnace. CONSTITUTION:From 0.1-0.5wt% CaCO3 is added to silicon powder, and the mixture is nitrided in the vacuum nitriding furnace. The alpha rate can be improved by the addition of CaCO3. Since a small amt. of CaCO3 is added, the amt. of CaCO3 to be left as impurities is small, and the industrial effect is high.
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