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发明名称
摘要
申请公布号	JPS58195883(U)	申请公布日期	1983.12.26
申请号	JP19820094106U	申请日期	1982.06.23
申请人		发明人
分类号	G01R31/26;G01R31/28;H01L21/66;(IPC1-7):G01R31/28	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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