PATTERN FORMING METHOD,申请号JP19880161653-传众专利搜索

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发明名称	PATTERN FORMING METHOD
摘要
申请公布号	JPH0234856(A)	申请公布日期	1990.02.05
申请号	JP19880161653	申请日期	1988.06.29
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	ENDO MASATAKA;SASAKO MASARU;NOMURA NOBORU
分类号	G03F7/016;G03F7/095;H01L21/027	主分类号	G03F7/016
代理机构		代理人
主权项
地址

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