| 摘要 |
PURPOSE:To improve the durability, traveling property and weathering resistance of a titled product, by laminating a magnetic and metallic thin film layer, a silicon compound layer and a protecting and lubricating layer respectively on a base body. CONSTITUTION:A base body W drawn out from a roller 10 in a delivery chamber 2 makes a glow discharge in a pre-treating chamber of glow discharge 3, wherein gaseous Ar causes glow discharge by an electrode 13 to which AC high voltage is applied, to clean the surface of the base body W. The base body subjected to the above mentioned treatment vaporizes a magnetic vaporizing source 18 in a base 17 by an electrobeam type heating means 16 in a depositing chamber 4 of magnetic metallic thin film to form a magnetic metallic thin film A. The base body which formed the above mentioned magnetic metallic thin film A, forms a silicon compound layer B in a silicon ester glow discharge treating chamber 5. Then, the above mentioned base body W laminates a protecting and lubricating layer C having a desired thickness on the above mentioned silicon compound layer B in a depositing chamber 6 of a protecting and lubricating layer and is wound on a roll 28. |
