| 摘要 |
PURPOSE:To execute efficiently analysis of estimation of a faulty part, etc., by fitting a semiconductor device to be analyzed and a standard semiconductor device of the same kind to a probing device, probing the same part, and comparing its resulted signal by an analyzing device. CONSTITUTION:An analyzing device 1 supplies a driving signal DS to a device to be analyzed 4 and a standard device 5 through probing devices 2, 3, and operates synchronously both the devices 4, 5. The operation of each device is transferred to the device 1 by an output pin signal and a signal of a probed node. The device 1 compares operating signals OS of both devices and analyzes existence of a fault of the device 4, or estimation of a faulty place etc. |
