| 摘要 |
PURPOSE:To detect a defect in the surface of a body to be checked, by providing a line scanning and projecting means which scans laser light in a specific direction crossing the movement direction of the body to be checked on the body to be checked which moves relatively, and arranging plural photodetection parts annularly over the body to be checked so that the body to be checked is surrounded. CONSTITUTION:A moving table 14, the line scanning and projecting means, annular photodetector 15, half-mirror 16, photomultipliers P1-P17, amplifiers A1-A17, discriminant function computing element 17, and display means 18 are provided. The moving table 14 conveys the body to be checked such as a microswitch 1 at an equal speed perpendicularly to the paper surface of a figure, and the line scanning and projecting means scans the laser beam light 19 on the switch 1 at an equal speed at right angles. The light reflected by the surface of the body 1 to be checked is guided to the photomultiplier P17 through the half-mirror 16, and photoelectric conversion and A/D conversion are performed. Then, 17 variable data from the photomultipliers P1-P17 are inputted to the computing element 17 after being amplified by amplifiers A1-A17, and a decision on ruggedness is made by the laser light 19 to display the result on a display 18. |
