Circular accelerator, operation method thereof, and semiconductor irradiation system

摘要

A small-sized circular accelerator capable of generating radiation of high brightness, an operation method of the circular accelerator, and a semiconductor irradiation system capable of using radiation of high brightness. An electron beam emitted from a pre-accelerator is injected to the inside of the storage ring by an injector, and accelerated and stored. Thereafter, each of insertion devices respectively disposed in linear orbit sections between main bending magnets and auxiliary bending magnets are excited to generate an alternating field therein. A meandering or spiral movement of the electron beam is caused by this alternating field. By superposing radiations emitted from vertexes of the meandering orbit or the spiral orbit, radiation having high brightness is generated.