| 摘要 |
PURPOSE:To enable automatic measurement and quantization of measured value by lighting ultraviolet laser rays only when a faceplate exists. CONSTITUTION:When a faceplate 2 to be inspected is fixed, faceplate inspectors 23 work, an arithmetic-controller 21 switches on a switch 24 of an ultraviolet laser light source 11 corresponding thereto. Next, the arithmetic-controller 21 performs control pulse motors 131 and 132 of a scanning mirror system while regulating so that parallel light may shine the scanning starting point of a phosphor screen 15 inside of the faceplate 2 in order to input the brightness information on three colors from the respective color phosphor layers of red blew and green in the range exposed to said parallel light into the arithmetic-controller 21. Subsequently, the parallel light is made to sweepingly scan the whole region of the phosphor screen while changing the angles of the pulse motors 131 and 132 according to the commands from the arithmetic-controller 21 and the sensor system 22 is made to travel according thereto in order to input the brightness information on the whole region of the phosphor into the arithmetic-controller 21 screen 15. In this way, the arithmetic-controller 21 judges balance of the respective colors red, green and blue basing on the brightness information as well as existence or non-existence of unevenness and also the quality of the phosphor screen. |
