METHOD FOR DEPOSITING DIAMOND LIKE CARBON LAYER BY USING NITRATING ION GENERATED IN MICRO-PULSE GLOW DISCHARGE

摘要

PURPOSE: A method for depositing diamond like carbon layer by using nitrate ion generated in micro-pulse glow process is provided, which provides a high-quality coating layer and improves adhesion force between material to be treated and diamond like carbon layer, and prevents the surface of the material to be treated from being polluted. CONSTITUTION: The method comprises: (i) charging a vacuum chamber with material to be treated; (ii) exhausting air of the vacuum chamber to make vacuum condition; (iii) eliminating impurities on the surface of the material to be treated by ionizing mixed gas of nitrogen and hydrogen through micro-pulse glow discharge; (iv) depositing carbon ion onto the surface of the material to be treated; and (vi) cooling down the diamond like carbon membrane deposited material to be treated of step(v) to room temperature.