| 摘要 |
PURPOSE:To form the discriminating symbol only by setting up a small-sized optical system by guiding laser beams near the back of the wafer from a laser phosphor through a glass fiber. CONSTITUTION:The glass fiber 7 is connected to the laser phosphor, the optical system 5 is set up at the tip of the glass fiber, and the optical system 5 is mounted to the box body of the device through a mobile base 1. Laser beams radiated from the laser phosphor are guided near the back of the wafer by the glass fiber, and irradiated to the back of the wafer to melt one part of the back. Melting shape takes quite the same shape as a wafer melted by a device through preceding technique. Accordingly, the discriminating symbol can be formed by moving a vacuum adsorbing base 3 and irradiating laser beams 6 thereto. |
