LINEAR LIGHT SOURCE DEVICE

摘要

PURPOSE:To obtain good resolution without variation in exposure energy, by forming an arc-shaped slit part with the 1st and the 2nd elastic members and moving the many tonguelike parts constituting the 2nd elastic member back and forth by a pressing means thereby changing the slit gap. CONSTITUTION:UV light passes through the gap W of an arc-shaped slit space 20 and forms its image on a mask. The driving part 16 of a pressing means 22 provided near the position in the longitudinal direction corresponding to the measured value of the exposure energy of said light is driven in a prescribed direction to press the tonguelike parts of an elastic member 13 thereby changing the gap W according to the result of said measurement. Since the gaps W in plural positions are changed as desired by the above-mentioned device, the exposure energy is held uniformly and the good resolution is obtained.