| 摘要 |
PURPOSE:To eliminate a shear lying between a picture analytic image and a line analytic profile, by adding a correction signal to an x-directional scanning signal of a CRT in time of being switched to a state of line analyzingness and thereby dislocating a starting point of x-directional scanning in response to a lag in the rise of an x-directional deflecting signal. CONSTITUTION:The output of a secondary electron detector 1 is impressed on a CRT2 for display use as a luminance signal while the output of a scanning signal generating circuit 3 is transmitted to a scanning circuit 4 where scanning the surface of a sample S takes place. When it is switched to a line analysis, the output of a signal processing circuit 9 is added to a y-directional scanning signal held so far, at an adding circuit 6A and transmitted to a scanning circuit 5. An adding circuit 6B adds the output of an operation circuit 10 to an x-directional scanning signal while the circuit 10 calculates the shear value on the basis of data transmitted from a time constant setter 12 of an x-directional speed setter 12 and the signal processing circuit 9, and gives the circuit 6B a correction signal. For this reason, at the CRT2, the x-directional scanning starts from a position being more dislocated than in case of a surface analysis, so that a shear in profiles can be eliminated. |
