发明名称 Magnetically-assisted sputtering method for producing vertical recording media
摘要 Disclosed is a method for producing vertical recording media by using magnetically-assisted sputtering apparatus to sputter from a magnetic target while selected portions of the target are heated to a temperature at or above Curie. Also disclosed are improved means for supporting the magnetic target during sputtering which permits the realization of enhanced sputtering efficiencies.
申请公布号 US4414087(A) 申请公布日期 1983.11.08
申请号 US19830462564 申请日期 1983.01.31
申请人 MECKEL, BENJAMIN B. 发明人 MECKEL, BENJAMIN B.
分类号 C23C14/34;H01J37/34;(IPC1-7):C23C15/00 主分类号 C23C14/34
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