发明名称 Method for making surface acoustic wave devices
摘要 A method is described for the fabrication of surface acoustic wave devices by the selective removal of one of the phases of a metallic eutectic solidified as a thin film having a lamellar morphology to form a first spaced array of metallic elements which then provides a self-aligned structure for the formation of a second array of metallic elements interdigitated with the elements of the first array.
申请公布号 US4414243(A) 申请公布日期 1983.11.08
申请号 US19820395778 申请日期 1982.07.06
申请人 GENERAL ELECTRIC COMPANY 发明人 CLINE, HARVEY E.
分类号 H03H3/08;(IPC1-7):B05D5/12 主分类号 H03H3/08
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