发明名称 Passivation of mercury cadmium telluride semiconductor surfaces by ozone oxidation
摘要 A process is provided for forming the native oxide on a semiconductor surface comprising Hg1-xCdxTe, where x ranges from 0 to 1. The process comprises exposing the semiconductor surfce to a mixture of ozone and oxygen containing an effective amount of ozone sufficient to form a native oxide thereon. The desired amount of ozone is conveniently obtained by passing oxygen from a source through an ozone generator provided with a source of high voltage.
申请公布号 US4414040(A) 申请公布日期 1983.11.08
申请号 US19810294670 申请日期 1981.08.20
申请人 SANTA BARBARA RES CENTER 发明人 KVAAS, ROBERT E.
分类号 C04B41/50;C04B41/85;C23C8/12;H01L21/473;(IPC1-7):C23C11/00 主分类号 C04B41/50
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