Pattern Collapse inhibiting method using RELACS material,申请号KR20010079351-传众专利搜索

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发明名称	Pattern Collapse inhibiting method using RELACS material
摘要
申请公布号	KR100569536(B1)	申请公布日期	2006.04.10
申请号	KR20010079351	申请日期	2001.12.14
申请人		发明人
分类号	G03F7/033;H01L21/027;G03F7/11;G03F7/38;H01L21/312	主分类号	G03F7/033
代理机构		代理人
主权项
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