| 摘要 |
PURPOSE:To have a batch process for production of a piezoelectric element and to improve greatly the production efficiency of said element, by coating a conductive paste to the cut grooves of a piezoelectric wafer to form a terminal electrode. CONSTITUTION:Plural pairs of patterns 22 and 23 are formed on the counter main surface of a piezoelectric wafer 11 together with conductive layers 16 and 17 which are used as a part of the terminal electrode. Then the main surface of one side of the wafer 11 is adhered to a dicing tape 18, etc., and grid-shaped wafer cut grooves 19 and 20 are formed along the surfaces containing a terminal electrode and no terminal electrode respectively. In such a way, an element plate 21, electrode patterns 22 and 23, and conductive layers 24 and 25 are divided with each element. A conductive paste is coated to the groove 19 by a screen printing means, etc., and then the tape 18 is extended to increase the grooves 19 and 20. Thus the paste is divided to obtain terminal conductive layers 27 and 28. Thereafter the plate 21 is separated from a tape 18', and conductive pastes 27 and 28 are dried. Thus a piezoelectric oscillating element is obtained. |
