| 摘要 |
PURPOSE:To execute an inspection stably with high reliability, by placing an optical lens for leading a light quantity reflected from an object to be inspected, to a photodetector so as to be made uniform extending over the width direction of the surface of the object to be inspected, between the object to be inspected and the photodetector. CONSTITUTION:A scanner 51 of a surface inspecting device irradiates a rotary mirror 54 through a collimator 53 with the light of an argon laser light source 52 and the light is reflected by a plane mirror 55 and a concave mirror 56, and is made incident to the surface of a steel plate 57 to be inspected. The laser light is made incident at a uniform incident angle extending over the whole area of measuring width of the steel plate 57 by rotating the rotary mirror 54. Also, a pair of photodetectors 58XA, 58XB are provided in the XA-XB direction being orthogonal to a scanning line of laser light between the scanner 51 and the steel plate 57, and also a pair of photodetectors 58YA, 58YB are provided in the YA-YB direction being parallel to the scanning line of the laser light. The reflected light from the steel plate 57 is photodetected by these photodetectors, and it is converted to an electric signal and is outputted. |
