发明名称 SINGLE CRYSTAL MAKING MACHINE
摘要 PURPOSE:A baffle plate is furnished in a crucible to prevent the melt to be crystallized from causing convection to effect stabilized growth of homogeneous single crystal. CONSTITUTION:The single crystal making machine consists of a crucible 6 containing the melt to be crystallized, heaters 7 for the crucible and a rotatable and vertically movable shaft 8 having a seed crystal on the F-part. In the crucible 6, a baffle plate 13 is set so that it is supported with a rotatable and vertically movable stick 14 which is set to the upper part of the chamber 11 to prevent the melt from causing convection. The shape of the baffle 13 may be any type such as parallel round disk, square plate, curved disk, wavy plate, perforated plate, mesh, or cylinder.
申请公布号 JPS58185493(A) 申请公布日期 1983.10.29
申请号 JP19820065356 申请日期 1982.04.21
申请人 HITACHI SEISAKUSHO KK 发明人 KATOU YUUSHI;YASUDA SADAO
分类号 C30B15/22;C30B15/30;H01L21/208 主分类号 C30B15/22
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