| 摘要 |
PURPOSE:To enable the mass production of the titled heater easily in low cost, by a method wherein a resistor paste containing a conductive material is deposited on the main surface of a ceramic green sheet in an optional wiring pattern and a separate sheet is stacked on the resulting wiring pattern formed sheet to carry out baking. CONSTITUTION:An org. binder is added to a stock material having heat resistance, heat conductivity and air-tightness after sintering comprising alumina, beryllia, mullite, zircon or cordierite to be kneaded therein and the obtained mixtuer is rolled or cast onto a flat surface to be dried by heating. On the main surface of thus formed ceramic green sheet 21, a resistor paste containing a conductive material such as Mo or W is deposited in a wavy, a spiral, a meandering or other optional wiring patterns 30. In the next step, a separate ceramic gree sheet 22 is stacked on the patterned surface to carry out baking in a non-oxidative atmosphere. After baking, the surface to be provided with a vapor deposition substance is polished to prepare a heater for a vacuum vapor deposition apparatus. |
