| 摘要 |
PURPOSE:To obtain a solar battery of excellent characteristics with a sufficiently flat surface and improved insulating feature by a method wherein a flexible and heat-resistant substrate is coated with a thin film of heat-resistant resin whereon electrodes and an amorphous Si film are formed into lamination. CONSTITUTION:A 100mum-thick stainless steel substrate 1 is so polished as to contain no difference in level larger than 0.1mum and is rotationally coated with heat-resistant resin to be subjected to baking for the formation of a 0.1-100mum- thick thin film 2. The substrate 1 is subjected to sputtering for the formation of lower electrodes 3a-3e that are to be arranged at prescribed intervals. The substrate 1 is then kept at temperatures near 250 deg.C and is exposed to plasma CVD to build an amorphous Si film 4 for the formation of a lamination in the order of P-I-N or N-I-P. An upper transparent electrode 5 is attached according to a prescribed pattern, opposed to the electrodes 3a-3e and with ends straddling over adjoining electrodes 3a-3e. The entirety is coated with an SiO2 film 6 for the completion of a serially connected amorphous Si solar battery. With the titled device being thus designed, a high quality solar battery is obtained rigid against bending and free of insulating defects between cells. |
