PIEZOELECTRIC DRIVE DEVICE, ROBOT, AND DRIVING METHOD OF ROBOT

摘要

PROBLEM TO BE SOLVED: To reduce vibration or backlash of a member to be driven.SOLUTION: A piezoelectric drive device includes a plurality of piezoelectric drive portions for driving a member to be driven, each of the piezoelectric drive portions has: a diaphragm; a piezoelectric vibrator provided on the diaphragm; and a contact member capable of contacting with the member to be driven, the piezoelectric drive portions have a first piezoelectric drive portion group and a second piezoelectric drive portion group. Each contact member of the piezoelectric drive portions included in the first piezoelectric drive portion group is arranged on a position symmetrical to a movement central axis or a movement center line of the member to be driven, and each contact member of the piezoelectric drive portions included in the second piezoelectric drive portion group is arranged on a position symmetrical to the movement central axis or the movement center line of the member to be driven. A timing for pressing the member to be driven by each contact member of the first piezoelectric drive portion group is different from a timing for pressing the member to be driven by each contact member of the second piezoelectric drive portion group.SELECTED DRAWING: Figure 7