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发明名称
감광성조성물 및 그것을 사용한 패터언형성방법
摘要
내용 없음
申请公布号
KR830006805(A)
申请公布日期
1983.10.06
申请号
KR19810002104
申请日期
1981.06.11
申请人
null, null
发明人
모리시다 하지메;고하시 다까히로;하야시 노부아끼;아까기 모도오;우찌노 쇼오이찌;노노가끼 사브로오
分类号
G03C1/52;C09B67/36;G03C1/54;G03C5/18;G03F7/26;G03F7/28;H01J9/227;H01J29/22;H01L21/027
主分类号
G03C1/52
代理机构
代理人
主权项
地址
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