发明名称 TESTING UNIT FOR SEMICONDUCTOR DEVICE
摘要 PURPOSE:To obtain a testing unit for a semiconductor device which has a rapid speed and a good efficiency by simultaneously testing a plurality of semiconductor devices with one testing head and efficiently sorting the semiconductor devices chuted from a plurality of testing heads arranged in parallel with each other into good and improper products respectively. CONSTITUTION:A sorting chute 14 which can be laterally moved as shown by an arrow is arranged directly at the downstream side of testing heads 131, 132, and two chute rows 141, 142 which can contain two semiconductor devices are aligned in parallel with each othr in the chute 14. A good product chute 15 is connected to a good product container, not shown, for containing semiconductor devices sorted as good products. In the chute 14, when one chute row 141 is disposed directly under the head 131, the other chute row 142 is disposed directly above the good chute 15, while when the row 142 is disposed directly under the head 132, the chute row 141 is disposed directly above the chute 15.
申请公布号 JPS58168249(A) 申请公布日期 1983.10.04
申请号 JP19820051996 申请日期 1982.03.30
申请人 TOKYO SHIBAURA DENKI KK 发明人 URASAKI NAOHIKO;MISHIMA MASATOSHI;TAKEO SHIGEKI;YAMAZAKI IWAO
分类号 H05K13/02;B65G11/00;G01R31/26;H01L21/66 主分类号 H05K13/02
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