| 摘要 |
PURPOSE:To obtain a cooling device having small size and high efficiency by independently forming a closed loop in which cooling medium for a laser power source is flowed and a closed loop in which cooling medium for a plasma discharge tube is flowed. CONSTITUTION:A coil of a relatively low temperature cooling medium passage 30 is disposed under a heat exchanger 10, and the coil 62 of relatively high temperature cooling medium passage 32 is disposed above the heat exchanger. Chilled air is fed from below the heat exchanger 10 via a fan 2 to cool sequentially the low temperature coil 60 and the high temperature coil 62 and exhausted upwardly. In this manner, the coil 60 cools the medium of the loop 30 from 35 deg.C to 30 deg.C, and the coil 62 cools the medium of the loop 32 from 60 deg.C to 55 deg.C by 5 deg.C respectively. In this manner, the power source 4 and a discharge tube 5 respectively become as low as 35, 55 deg.C. Thus, the heat exchanger 10 does not need large cooling capacity, thereby reducing the power consumption and improving the cooling efficiency. |
