摘要 |
PURPOSE:To increase the mechanical strength of a SQUID element by bonding an insulator of quartz onto the body of the superconductive thin film SQUID element having a Josephson junction and the junction with thermoconductive ambient temperature curable epoxy resin, thereby preventing the progress of oxidation of the junction. CONSTITUTION:A SQUID element 2 on a substrate 1 has holes at both sides of a Josephson junction, thereby forming a spectacles-shaped superconductive ring. A resonance coil 4 and a magnetic flux input coil 6 are respectively individually inserted into the holes, and a resonance capacity 5 is connected in parallel with the coil 4. An insulating plate 8 of quartz or Si or the like which has coil inserting holes corresponding to the holes of the element 2 is bonded with epoxy resin 9 which has good thermoconductivity, impact resistance and ambient temperature curability. Thus, the superconductive film is shielded from atmosphere, thereby preventing the progress of the oxidation and mechanically protecting it. The plate 8 is utilized for fixing the leads 11 and terminal of the coil 10, thereby reducing the size of the element. |