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发明名称
PROCESS FOR FABRICATING A DEVICE INVOLVING USE OF A PHOTORESIST
摘要
申请公布号
EP0068098(A3)
申请公布日期
1983.09.28
申请号
EP19820103552
申请日期
1982.04.27
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
MARINACE, JOHN CARTER;MCGIBBON, RALPH CHARLES
分类号
G03F7/09;G03F7/11;H01L21/312;(IPC1-7):H01L21/31;G03F7/02
主分类号
G03F7/09
代理机构
代理人
主权项
地址
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