发明名称 PREPARATION OF SEMICONDUCTOR CRYSTAL
摘要 PURPOSE:To realize uniform growth of crystal by washing a cadmium telluride crystal substrate before it does not yet grow with a tellurium-dissolved solution. CONSTITUTION:After inserting a slider 5 providing a cadmium telluride substrate 8 and a dissolved-solution pot 6 including a containing parts 6a, 6b containing a solution 7b for growth consisting of a tellurium melt 7a, a cadmium mercury telluride and tellurium into the furnace core tube (not illustrated), the specified temperature change is given to such a tube. Before several seconds of the contact temperature of the solution 7b, the tellurium melt 7a is splashed over the substrate 8 by sliding the dissolved-solution pot 6 in order to wash the surface of substrate 8. After several seconds, the tellurium melt 7a is removed from the substrate 8, and the melt 7b for growth is then splashed over the substrate 8. Thereby, holes formed on the cadmium mercury telluride crystal 11 are remarkably reduced and a crystal grows up uniformly.
申请公布号 JPS58154238(A) 申请公布日期 1983.09.13
申请号 JP19820038901 申请日期 1982.03.09
申请人 MITSUBISHI DENKI KK 发明人 OOKATA RIYOUJI;NAGAHAMA KOUKI
分类号 H01L31/04;H01L21/368;H01L31/00 主分类号 H01L31/04
代理机构 代理人
主权项
地址
您可能感兴趣的专利