| 摘要 |
PURPOSE:To rationalize the manufacturing steps and to improve the quality of a specimen feeding device by rotating a rotor having a specimen container in a casing which is connected to different atmosphere, thereby continuously feeding the specimen between different atmospheres. CONSTITUTION:A casing 1 is obliquely disposed, and a guide passage 2 is connected to atmospheric pressure and a discharge passage 3 is connected to a high vacuum. A rotor 5 is disposed in a space 4, a container 6 having holes corresponding to the passages 2, 3 is provided, supported via bearings 7, and driven by a driver 8 around a shaft 9. The rotor 5 is formed in a disc shape, and a hollow specimen container 6 is circumferentially opened laterally symmetrically. Sufficient exhaust resistance gap 10 is formed to maintain different atmospheres between the space 4 and the rotor 5. A specimen 11 is guided by a guide 2, and fed to the passage 3 of different atmosphere. According to this structure, the disconnection of automation due to batch process can be avoided, thereby rationalizing the steps and improving the quality. |
