发明名称 |
TARGET TEMPERATURE LIMIT CONTROL DEVICE |
摘要 |
The device comprises, inserted between the holder and the target, a deformable diaphragm (1) preformed so as to be laid perfectly onto the rear face of the target (6) in order to trap, in the space contained between the holder (5) and the diaphragm (1), a fluid swelled under an internal pressure ensuring intimate contact between the diaphragm and the target and ensuring the transfer of heat from the diaphragm to the holder. <IMAGE> |
申请公布号 |
JPS58144475(A) |
申请公布日期 |
1983.08.27 |
申请号 |
JP19830000160 |
申请日期 |
1983.01.04 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
MISHIERU BURUERU;ARAIN SUBII |
分类号 |
C23C14/34;G05D23/01;G05D23/19;H01L23/427 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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