| 摘要 |
PURPOSE:To commonly use a part of component members and consequently reduce the capacities of facilities without impairing the reliability of a vacuum pump device by a structure wherein a plurality of water sealed rotary vacuum pumps are provided and at the same time one separator tank and one water sealed cooler are provided with respect to a plurality of the water sealed rotary vacuum pumps. CONSTITUTION:In the hogging operation (or operation under the state that an air type ejector 6 is bypassed), water sealed rotary vacuum pumps 9A and 9B are put in use and consequently a vacuum pump device has a capacity of two pumps. In the holding operation (or operation under the state that the air type ejector 6 is put into operation), one pump is put into operation and the stand-still water sealed rotary vacuum pump 9B serves as a stand-by pump. Because the failure rates of component apparatuses excluding the water sealed rotary vacuum pumps 9A and 9B and water sealed pumps 11A and 11B or excluding all the rotary machines may be regarded as nul, two pairs of the component apparatuses excluding the rotary machines can be used in common. The capacity of a water sealed cooler 12 can be reduced to the order of the capacity of one water sealed rotary vacuum pump with somewhat margin. The capacity of a separator tank 10 is not necessary to equal the capacity for two water sealed rotary vacuum pumps, similarly as the water sealed cooler 12 and is enough only to have a separating function and can be reduced to a smaller capacity.
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