发明名称 Temperature gradient zone melting process employing a buffer layer
摘要 A process is provided for fabricating a semiconductor device by thermal gradient zone melting, whereby metal-rich droplets such as aluminum migrate through a semiconductor wafer such as silicon to create conductive paths. One surface of the wafer in provided with a buffer layer thereon, which is placed directly on a heating surface. The buffer layer terminates the migration of the droplets to prevent alloying of the droplets with the heating surface.
申请公布号 US4398974(A) 申请公布日期 1983.08.16
申请号 US19820366900 申请日期 1982.04.09
申请人 HUGHES AIRCRAFT COMPANY 发明人 CHOW, KUEN;GRINBERG, JAN
分类号 C30B13/02;H01L21/24;(IPC1-7):H01L21/22 主分类号 C30B13/02
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