发明名称 Etching and etchant removal apparatus
摘要 Etching method and etching and etchant removal apparatus. A specific embodiment includes two sets of fan spray nozzles located adjacent to the etching chamber and positioned to direct a spray at the work piece as the work piece exits the etching chamber. A sensor is also located adjacent to the etching chamber for turning the nozzles on when the work piece is present. Hydrometer means for determining the specific gravity of the etchant solution controls one set of nozzles whereby the nozzles are turned on to decrease the density of the etchant and turned off to increase the density of the etchant.
申请公布号 US4397708(A) 申请公布日期 1983.08.09
申请号 US19800190875 申请日期 1980.09.25
申请人 KOLTRON CORPORATION 发明人 FRANTZEN, JOHN J.
分类号 C23F1/08;(IPC1-7):C23F1/02 主分类号 C23F1/08
代理机构 代理人
主权项
地址