| 摘要 |
PURPOSE:To detect the penetration characteristics of resist with respect to etching solns. easily with good accuracy by using liquid prepd. by dissolving non-corrosive penetration control agents selected among polyhydric alcohol, and liquid dissolved, NaCl, etc. in water. CONSTITUTION:Ethylene glycol, diethylene glycol, polyethylene glycol, glycerol, etc. are usable as non-corrosive penetration control agents for the purpose of obtaining inspecting liquid of which the time of penetration in resist is suitable for inspection operation and has a good correlation with that of etching solns. An electrolyte such as NaCl for the purpose of measuring penetration time by electric resistance or short circuiting is added to such aq. soln. having a suitable concn. ot make the soln. conductive. The penetration characteristics of the resist with respect to the etching solns. are measured easily with good accuracy by using such inspecting liquid. Defects such as uneven surfaces of resist are detected easily before etching and the prior setting or etching conditions is made possible. |
