| 摘要 |
PURPOSE:To prevent obstruction of visual field due to vapor-deposited substance in observing from outside at the time of vapor deposition by inserting a transparent body that can be heated to a high temperature in a light path from the evaporation source to the peep window. CONSTITUTION:A transparent body 6 that can be heated to a high temperature is inserted between an evaporation source 2 and a mirror 5. When current is allowed to flow in the transparent body 6 structured by incorporating a heater 8 in a container made of quartz that has two flat plates infront and rear, the transparent body 6 is heated, and the adhesion of vapor-deposited substance such as Pb, In etc. to the body 6 can be prevented. Accordingly, obstruction of light path for observing the evaporation source 2 due to the vapor-deposited substance does not take place. |
