HIGH SPEED PLASMA ETCHING SYSTEM,申请号EP19820102911-传众专利搜索

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发明名称	HIGH SPEED PLASMA ETCHING SYSTEM
摘要
申请公布号	EP0064163(A3)	申请公布日期	1983.07.27
申请号	EP19820102911	申请日期	1982.04.05
申请人	THE PERKIN-ELMER CORPORATION	发明人	STEINBERG, GEORGE N.;REINBERG, ALAN R.;AVE, JEAN DALLE
分类号	C23F4/00;H01J37/32;H01L21/302;H01L21/3065;(IPC1-7):H01J37/32	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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