| 摘要 |
PURPOSE:To position the semiconductor laser chip at high speed with high accuracy by a method wherein light beams are irradiated onto the side surface of the semiconductor laser chip, the direction of reflected light is detected and the angle of rotation of a collet is controlled by a servomechanism. CONSTITUTION:Light beams emitted from a laser 9 are irradiated onto the side surface of the semiconductor laser chip 7 adsorbed to the collet 4. The distribution of luminous flux is equalized previously by passing light beams through a slit 11. Reflected light is passed through the slit 11 and received by a photodiode, and output is amplified by a preamplifier 14, and supplied to a servo amplifier 16 through a timing switch 15. Output is further amplified by the amplifier 16, a servomotor 17 is driven and the collet 4 is operated. The photodiode is constituted by combining left and right reversible ones while making the center to be a boundary. Accordingly, the angle of the chip 7 is controlled so that reflected light reaches the center of the photodiode, and die bonding is prepared. |
