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发明名称
SEMICONDUCTOR PROCESSING APPARATUS
摘要
申请公布号
JPS58122735(A)
申请公布日期
1983.07.21
申请号
JP19820004726
申请日期
1982.01.14
申请人
TOKYO SHIBAURA DENKI KK
发明人
SATOU MASANORI
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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