发明名称 |
Spectroscopic monitoring of gas-solid processes |
摘要 |
A method for accurately monitoring and adjusting gas phase processes such as gas etching and chemical vapor deposition has been found. This method relies on the use of induced fluorescence. The gaseous phase used in the process to be monitored is probed by excitation with a suitable energy source. The emission from the gas phase induced through this excitation is then monitored and yields an accurate measure of concentration of the active species present. In turn the conditions of the fabrication process are adjusted based on these discerned concentrations.
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申请公布号 |
US4394237(A) |
申请公布日期 |
1983.07.19 |
申请号 |
US19810284468 |
申请日期 |
1981.07.17 |
申请人 |
BELL TELEPHONE LABORATORIES, INCORPORATED |
发明人 |
DONNELLY, VINCENT M.;FLAMM, DANIEL L.;KARLICEK, JR., ROBERT F. |
分类号 |
H01L21/302;C23C16/52;C23F4/00;G01N21/64;H01L21/205;H01L21/3065;H01L21/31;(IPC1-7):C23C15/00 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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